Simulating Fabrication of an All-Silicon Pressure Sensor

From 2012 Automotive Simulation World Congress: All-silicon pressure sensors for automotive applications use a thin silicon diaphragm that deforms under applied pressure. The diaphragm is fabricated in steps in which material is either removed or bonded to a volume of silicon. These processes take place at different temperatures; they can be accomplished by physical means, such as grinding, or by chemical etching. To determine the final product’s stress state, the engineering team simulated the process by applying element birth and death and substructuring techniques to the finite element model of sensor and substrate.

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