Mesostructure Evolution: Multiscale Process and Materials Modeling in Microelectronics

• Show results of two multiscale modeling (6 or 7 orders of magnitude in space) efforts – Concurrent solutions at all scales – Goal is to relate equipment setpoints to responses • Summarize our efforts on grain-focused models for polycrystalline films – Structures at the “mesoscale” exist in many areas – Our work focuses on allowing you to use your process models to evolve meso-structures

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