Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5μm silicon nitride micro-shutter for use in a space-based Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go from the closed, 0 degree, position, to the open, 90 degree position. Stresses in the torsion hinge are determined with a large deformation nonlinear finite element model. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.

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