Putting Analysis to Work: Multiphysics Tools for MEMS - White Paper

One of the hottest technology growth areas is microelectromechanical systems (MEMS), which also is called micromachines and microsystems in Asia and Europe. Made with semiconductor construction techniques, these devices have tiny parts measured in microns (millionths of a meter) and are frequently combined with integrated circuits on a single chip to provide built-in intelligence and signal processing.
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