Mesostructure Evolution: Multiscale Process and Materials Modeling in Microelectronics - Conference Paper

Show results of two multiscale modeling (6 or 7 orders of magnitude in space) efforts – Concurrent solutions at all scales – Goal is to relate equipment set points to responses. Summarize our efforts on grain-focused models for polycrystalline films – Structures at the “mesoscale” exist in many areas – Our work focuses on allowing you to use your process models to evolve meso-structures.