There are many user of ANSYS Multiphysics in the Microsystems community globally. There are a large number of researchers and engineers who share their ANSYS experiences by publishing technical papers. This section lists some of the most important reference works, downloadable in PDF format .
ANSYS Solutions Magazine Articles:
The ANSYS Solutions Magazine is free to all customers. We have published ten MEMS specific articles in ANSYS Solutions.
Analyzing Microminiature Devices. (Volume 1, #1, Spring 1999).
Modeling MEMS Resonant Devices Over a Broad Temperature Range. (Volume 1, #2, Fall 1999).
Tooling up for Micro Electro Mechanical Systems. (Volume 2, #1, Winter 2000)
Quality Based Design from Probabilistic Methods. (Volume 2, #2, Spring 2000)
Developing Tunable MEMS Filters. (Volume 2, #3, p6 Summer 2000)
Tiny Devices, Big Problems. (Volume 2, #3, p11 Summer 2000 )
ANSYS 5.7 MEMS Comb Drive Problem (Volume 3, #1, p15, Winter 2001)
MEMS Modeling and Simulation (part 1 of 3)
(Volume 3, #2, Spring 2001)
MEMS Modeling and Simulation (part 2 of 3)
(Volume 3, #3, Summer 2001)
MEMS Modeling and Simulation (part 3 of 3)
(Volume 3, #4, Fall 2001)
Technical Papers from ANSYS Corporate:
Hybrid P-Element & Trefftz Method for Capacitance Computation -(MSM 2000).
Hybrid Finite Element - Trefftz Method for Open Boundary Analysis -(MSM 2000).
Finite Element Based Reduced Order Modeling of MEMS -(MSM 2000).
Quality Based Design and Design for Reliability of MEMS Using Probabilistic Methods -(MSM 2000).
Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program -(MSM 2002).
Selected Papers from ANSYS Users and Partners
Development of CAD Model for MEMS Micropumps - University of Minnesota - (MSM1999).
Simple APDL Implementation of a 3-D FEM Simulation for Mutual Capacitance of Arbitrary Shaped Objects - Siemens / IBM DRAM - (MSM1999).
Numerical & Analytical Modeling of a PiezoElectric Transformer & Experimental Verification - LIMMS/CNRS University of Tokyo - (MSM1999).
Analytical Simulation of a 1D Single Crystal Silicon Electrostatic Micromirror - LAAS/CNRS - (MSM1999).
Numerical Simulations of Flat-walled Diffuser Elements for Valveless Micropumps - Royal Institute of Technology - Sweden (MSM1999).
Modeling Approach for CVD-Diamond based Mechanical Structures - University of Ulm -(MSM1999)
Modeling of the Piezoelectric Micropump for Improving Working Parameters - IMT Bucharest - (MSM1999)
PZT Actuated Micromirror for Nano-Tracking of Laser beam for High Density Optical Data Storage - LG Corporation - (IEEE MEMS 2000).
Structural Modeling and Probabilistic Characterization of MEMS Pressure Sensor Membranes -Nemeth, Palko, Zorman, Jadaan and Mitchell (2001).
Q-Optimized Lateral Free Beam Micromechanical Resonators - Hsu, Clark and Nuygen, (Transducers 2001)
Computational Methods for Reduced Order Modeling of Coupled Domain Simulations - Benini, Mehner and Dozel (2001)
Investigating the Reliability of Electrostatic Comb-Drive Actuators Utilized in Microfluidic and Space systems Using Finite Element Analysis - Moussa, Ahmed, Badawy, and Moussa (IEEE 2002)
Modeling a MEMS Switch -Yan, McGruer, Adams and Majumder (2002).
A Mechanical Approach to Overcome RF MEMS Switch Stiction Problem - L.L. Mercado, S.M. Kuo, T.Y.T. Lee, and L. Liu, (ECTC, 2003)