Piezoelectric analysis capability is important for several classes of MEMS transducers such as beam steerers / mirror actuators and micro-diaphragm pressure transducers, measuring pressure as a function of strain. Recent advances in process technology has allowed engineers to incorporate thin layers of piezoelectric material in surface micro-machined devices. These devices typically undergo large deformations and provide more efficient actuator performance than both electrostatic-structural and thermal-structural actuators. ANSYS Multiphysics provides the following advanced piezoelectric capabilities:
Material properties for a piezolectric analysis requires the following 3 parts:
These material properties are input by the user using intuitive GUI dialogue boxes, direct input of the piezolelectric stress or strain matrix is available:
Piezoelectric actuated MEMS beam steerer (courtesy Waveprecision, A division of GSI Lumonics). The two support arms have a layer of piezo electric material that move the square reflecting surface.