The ANSYS MEMS Bibliography of Published Technical Papers

The complete bibliography of ANSYS MEMS User Papers in chronological order, with Web URL references (if available):

168 papers are listed. Click here for latest papers from 2006.

1990:

Squeeze Film Damping in Solid State Accelerometers, James B. Starr, Technical Digest IEEE Solid State Sensor and Actuator Workshop, pp 44-47, June 1990.

1993:

Finite-element Analysis of Thermal Distortion of Directly Water-cooled Silicon Crystal Monochromator, K. T. Takeshita, T. Matsushita, A. Mikuni; T. Maruyama, H. Yamaoka, pp 528, Proc. SPIE Vol. 1739, p. 528-531, High Heat Flux Engineering, February 1993.

1994:

Electrostatically Deflectable Polysilicon Torsional Mirrors, Fischer, M., Graef, H. and von Munch, W., pp 83, Sensors and Actuators A, Vol. 44 , 1994.

1995:

Design, fabrication & testing of fixed-valve micro-pumps, F.K. Forster, R.L. Bardell, A. Afromowitz, N. R. Sharma, A. Blanchard, pp 39, ASME IMECE 1995.

Simulation of micro-system-oriented tasks with coupled simulators, C. Clauss, R. Gruschwitz, P Black, S. Desires, p92, Trade conference micro system engineering - micro mechanics & microelectronics, Chemnitz, 16./17. October 1995.

1996:

Simulator Coupling for Electro-Thermal Simulation of Integrated Circuits, S. Wünsche, pp 89, Proc. 2nd THERMINIC Workshop, Budapest, 25.-27. September 1996.

Modeling of substrate-induced anisotropy in through-plane thermal behavior of polymeric thin films, J.B. Lee, M. G. Allen, T. C. Hodge, S. A. Bidstrup, P. A. Kohl, pp 1591, volume 34, number 9, Journal of Polymer Science: Part B. Polymer Physics, July 1996.

1997:

Design and Analysis of Surface-Micromachined Two-axis Silicon Yaw-rate Sensor, S. Han, and J. Pak, pp 124, Proc. SPIE Vol. 3242, Smart Electronics and MEMS, November 1997.

Micro Membrane Vibrator with Thermally Driven Bimorph Cantilever Beams, C. Tsao, and W. Hsu, pp 195, Proc. SPIE Vol. 3241, Smart Materials, Structures, and Integrated Systems, November 1997.

Design Tools and Issues of Silicon Micromachined (MEMS) Devices, B. R. Davies, M. S. Rodgers and . Montague, MEMS Design, Micro-Electro-Mechanical Systems, Intelligent Micromachine Department Sandia National Laboratories, 1997.

ANSYS-Structural Design of Micromachined Fabry-Pérot Filters for WDM Applications, K. Mutamba, J. Pfeiffer, J. Peerlings, R. Riemenschneider and N. Dragojevic, proceedings of International Topical Meeting on Photoelectronics 1997, Beijing, China.

Electro-thermal circuit simulation using simulator coupling, S. Wünsche C. Clauss, P. Schwarz, F. Winkler, pp 277, volume 5, number 3, IEEE Trans. VLSI, 1997.

1998:

Electrostatically deflectable Polysilicon Micromirrors - dynamic behavior and comparison with the results from FEM modeling with ANSYS, Fischer, M., Giousouf, M., Schaepperle, J., Eichner, D., Weinmann, M., von Munch, W. and Assmus, F., Sensors and Actuators A, Vol. 67 (1998), pp. 89-95.

Network-Type Modeling of Micromachined Sensor Systems, G. Lorenz and R. Neul, pp? Proc. of the Modeling and Simulation of Microsystems Conference (MSM1998), 1998.

Computational Two-Dimensional Finite-Element Analysis of Flow Behavior Inside Microfluidic Amplifiers, E.W. Simões, R. Furlan and J.N. Zemel, Proc. of the Modeling and Simulation of Microsystems Conference (MSM1998), 1998.

Design Optimization Using Coupled FEM and Electrical Circuit Simulation, H. Krassow, M. Zabala, A. Götz and C. Cané, pp?, Proc. of the Modeling and Simulation of Microsystems Conference (MSM1998), 1998.

Computational modeling and parametric study of a rotary actuator driven by piezoelectric composites, H. Li, and S.W. Lee, pp 414, Proc. SPIE Vol. 3323, Smart Structures and Materials 1998: Mathematics and Control in Smart Structures, July 1998.

Fluid-coupled Hollow Metallic Micromachined Needle Arrays, J. Brazzle, I. Papautsky, and B.Frazier, pp 116, Proc. SPIE Vol. 3515, Microfluidic Devices and Systems, August, 1998.

First Micromachined Silicon Load Cell for Loads up to 1000 kg, H. Wensink, M. de Boer, R. Wiegerink, R. Zwijze, and M. Elwenspoek, pp 424, Proc. SPIE Vol. 3514, Micromachined Devices and Components IV, August, 1998.

Microfluidic Amplifiers Fabricated in Silicon, Eliphas Wagner Simões, pp175, Anais da XIII SBMicro -
International Conference on Microelectronics and Packaging (ICMP'98), 1998

Fully Integrated Magnetically Actuated Micromachined Relays, W. P. Taylor, O. Brand, and M. G. Allen, pp181, volume 7, no. 2, IEEE/ASME Journal of Microelectromechanical Systems, 1998.

Fluid Coupled Micromachined Needle Arrays (MPA), J.D. Brazzle, I. Papautsky, and A.B. Frazier, pp. 1837, IEEE International Conference on Engineering in Medicine and Biology, 1998.

1999:

Design and Simulation of a Micromirror Array for a Projection TV, B. Choi, J. Lee, K. Jung, H. Shin, pp 293, Proc. SPIE Vol. 3878, Miniaturized Systems with Micro-Optics and MEMS, September, 1999.

Design and FEM simulation: all-light-processing infrared image transducer, L. Zhang, G. Q. Yang, pp 293, Proc. SPIE Vol. 3878, Miniaturized Systems with Micro-Optics and MEMS, September 1999.

Effect of Holes and Edges on the Squeeze Film Damping of Perforated Micromechanical Structures, Eung-Sam Kim, Yung-Ho Cho and Moon-Uhn Kim, p296, Proc. of IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '99), 1999.

A Technique for Determining the Mechanical behavior and electrical Performance of Thin Films, Li Li, B. Huang, Q. Qiao, M. H. Gordon, W. F. Schmidt and S.S. Ang, pp 545, MEMS-Vol 1, Proc. 1999 ASME International Mechanical Engineering Congress and Exposition.

The Electro-Thermally Driven Micro Membrane Actuator with Two-way Deflection, C. Peng Hsu and W. Hsu, pp 561, MEMS-Vol 1, Proc. 1999 ASME International Mechanical Engineering Congress and Exposition.

The Effect of Residual Stresses on the Deformation of Semi-circular Micromachined Beams, C. Tsou and W. Fang, pp347, MEMS-Vol 1, Proc. 1999 ASME International Mechanical Engineering Congress and Exposition.

A New Driving Principle for Micromechanical Torsional Actuators, H. Schenik, P. Durr, D. Kunze and H. Kuck, pp 333, MEMS-Vol 1, Proc, 1999 ASME International Mechanical Engineering Congress and Exposition.

Design, Fabrication and Characterization of Micromirror Array for Display Application, H. Shin, H. Ko, Y. Yoon and B. Choi, pp303, MEMS-Vol 1, Proc. 1999 ASME International Mechanical Engineering Congress and Exposition.

Simple APDL Implementation of a 3D FEM Simulator for Mutual Capacitances of Arbitrarily Shaped Objects Like Interconnects, A. Heike, pp172, Proc. of the Microsystems Modeling Conference (MSM 1999), 1999.

APDL Implementation of a 3D FEM Capacitance Simulator for Arbitrarily Shaped Interconnects, A. Heike, pp91, Journal of Modeling and Simulation of Microsystems (JMSM), Vol 1, #2, 1999.

Numerical and Analytical Modeling of the Piezoelectric Transformer and experimental Verification, S. Hallaert, E. Sarraute and B. Le Pioufle, pp 198, Proc. of the Modeling and Simulation of Microsystems Conference (MSM1999), 1999.

Electro-Mechanical Transducer for MEMS Analysis in ANSYS, M. Gyimesi and D. Ostergaard, pp270, Proc, of the Modeling and Simulation of Microsystems Conference (MSM1999), 1999.

Microvalve Analysis: Wall Shear and diffuser Effects, M. Carmona, S. Marco, J. Samitier, M. C. Acero, J. A. Plaza, J. Esteve, pp554, Proc. of the Microsystems Modeling Conference (MSM1999), 1999.

Numerical Simulation of Flat-Walled diffuser Elements for Valveless Micropumps, A. Olsson, G. Stemme, and E. Stemme, pp 585, Proc. of the Microsystems Modeling Conference (MSM1999), 1999.

Analytical Simulation of a 1D Single crystal Silicon Electrostatic Micromirror, H. Camon, F. Larnaudie, F. Rivoirard and B. Jammes, pp628, Proc. of the Microsystems Modeling Conference (MSM1999), 1999.

Modeling of the Piezoelectric Micropump for Improving Working Parameters, O. T. Nedelcu and V. Moagar-Poladian, pp 659, Proc. of the Microsystems Modeling Conference (MSM1999), 1999.

Modeling of SiC Lateral Resonant Devices Over a Broad Temperature Range, R. G. DeAnna, S. Roy, C. A. Zorman, and M. Mehregany, pp644, Proc. of the Microsystems Modeling Conference (MSM1999), 1999.

Modeling Approach for CVD-Diamond Based Mechanical Structures, P. Schnid, M. Adamshik, S. Ertl, P. Gluche and E. Kohn, pp?, Proc. of the Microsystems Modeling Conference (MSM1999), 1999.

Simple Modeling and simulation of the Squeeze Film Effect and transient Response of the MEMS Device, K. Minami, T. Matsunaga, and M. Esashi, pp.338, Proc. of IEEE International Workshop on Micro Electro Mechanical Systems, 1999.

Novel Differential Pressure Sensor with Silicon Beams Embedded in a silicone Rubber Membrane,C. Seo, S, Gon, J. Sim, K. Koh, J. Shin, J. Lee, H. Seo, Y. Kim and C. Seol, pp 354 , Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

An Un-cooled Micro-bolometer Infrared Detector in Any Standard CMOS Technology, D. S. Tezcan, F. Kocer and T. Akin, pp 610, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Silicon Micro-Optical Scanner, N. Asada and M. Takeuchi, pp 778, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Micro Electro Mechanical Digital-to-Analog Converter (MEMDAC), H. Toshiyoshi, D. Kobayashi, M. Mita, G. Hashiguchi, H. Fujita, J. Endo and Y. Wada, pp 994, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Testing of a Micro-Rotating Gyroscope, C. Shearwood, K.Y. Ho and H. Q. Gong, pp 984, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Electrostatic Diamond Microswitch, M. Adamschik, S. Ertl, P. Schmid, P. Gluche, A. Floter and E. Kohn, pp 1284, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Anneal-Activated, Tunable, 68 MHz Micromechanical Filters, A Wong, J. R. Clark and C. Nguyen, pp 1390, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

A Novel Resonant Accelerometer; Variable Electrostatic Stiffness Type, B. Lee, C Oh, Y. Oh, and K. Chun, pp1546, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Parallel Beam Gyroscope, H. Sato, T. Fukuda, F. Arai and K. Itiogawa, pp 1586, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Miniature Bi-Axial Gyro-Sensor Using Disk-Type Resonator, N. Shiratori, M. Hatakeyama, S. Okada, and Y. Tominkawa, pp 1602, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Linarisation of the Response of a Surface Micromachined CMOS FET Pressure Sensor Using Membrane Touchdown, E. Hynes, M. O'Neill, D. McAuliffe, H. Berney, W. A. Lane, G. Kelly, and M. Hill, pp 1614, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Thin film Shape Memory Microvalves with Adjustable Operation Temperature, M. Kohl, D. Dittman, W. Quandt and B. Winzek, pp 1808, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Characterization and Optimization of Mono_Crystalline In-Plane Operating Check Valves, R. Oosterbroak, J. Berenschot, S. Schlautmann, T. Lammerink, G. Krijnen, M. Elwenspoek, A. van den Berg, pp1816, Proc. of. 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), 1999.

Design and sensitivity optimization of vibration sensors for tool-state monitoring, J. Thomas, R. Kuehnhold, H. Ryssel, ,pp 423, Proc. SPIE Vol. 3680, Design, Test, and Microfabrication of MEMS and MOEMS, March 1999.

Silicon microphysiometer for high-throughput drug screening, K. Verhaegen, K. Baert, B. Puers, W. Sansen, J. Simaels,; W. van Driessche, L. Hermans, and R. Mertens, pp 20, Proc. SPIE Vol. 3606, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications II, June 1999.

Influence of different materials on the thermal behavior of a CDIP-8 ceramic package, K. Weide, and C. Keck, pp 156, Proc. SPIE Vol. 3884, In-Line Methods and Monitors for Process and Yield Improvement, August 1999.

Advanced MEMS Ferroelectric Ultrasound 2-Dimensional Arrays, Jonathan J. Bernstein, John Bottari, Kenneth Houston, Gregory Kirkos, Raanan Miller, Baomin Xu, Yaohong Ye & Eric L. Cross, Proceedings of IEEE Ultrasonics Symposium, 17-21 October 1999.

2000:

A Novel Micro Gas Sensor with High Selectivity Based on Both Mass and conductivity measurement, T. Xu, G. Wu, G. Zhang, W. Wang and T. Li, pp 108, Proc. of Annual International Conference of Micro Electro Mechanical Systems, 2000 (IEEE-MEMS 2000)

A Monolithic Fully-Integrated Vacuum Sealed CMOS Pressure Transducer, A. V. Chavan and K. D. Wise, pp 341, Proc. of Annual International Conference of Micro Electro Mechanical Systems, 2000 (IEEE-MEMS 2000)

PZT Actuated Micromirror for Nano-Tracking of Laser beam for High-Density Optical Storage, Y. Yee., H Nam, S Lee, J Uk Bu, Y. Jeon and S. Cho, pp435, Proc. of Annual International Conference of Micro Electro Mechanical Systems, 2000 (IEEE-MEMS 2000)

Microconnectors for the Passive Alignment of Optical Waveguides and Ribbon Optical Fibers, N. Kaou, V. Armbruster, J.C. Jeannot, P. Mollier, H.Porte, N. Devoldere, and M. de Labachelerie, pp 692, Proc. of Annual International Conference on Micro Electro Mechanical Systems, 2000 (IEEE-MEMS 2000).

Electrostatic Spring Effect on the dynamic Performance of Microresonators, F. Tay, E. H. Kumara, R. Chua, and Logeesswaran VJ, pp 154, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Modeling and Optimization of Bi-stable Optical Switch, H. Maekoba, P. Helin, G. Reyne, T. Bourouina and H. Fujita, pp 166, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Generation of a Metamodel for a Micromachined Accelerometer using T-SPICE and the Iz-Optimality Option of I-OPT,pp 201, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Electromechanical Analysis of Micromechanical SOI-Fabricated RF Resonators, T. Lamminmaki, K. Ruokonen, I. Tittonen, T. Mattila, O. Jaakkola, A. Oja, H. Sepa, P. Seppa and J. Kiihmaki, pp 217, pp 166, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Modeling of High-speed Diamond Microswitch, P. Schnid, M. Adamshik, S. Ertl, P. Gluche and E. Kohn, pp 237, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Finite-Element Modeling of 3C-SiC Membranes, R.G. DeAnna, J. Mitchell, C.A. Zorman and M. Mehregany, pp 253, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Design Simulation and Fabrication of a Bridge Structure Microtransducer, M. Zang, S. Zurn, D. Polla, B. Nelson, and W. Robbins, pp 265, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Topics in Finite-Element Modeling of Piezoelectric MEMS, F. J. von Preissig and E. Kim, pp 269, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Influence of Element Size on the Precision and Required Computational Effort for 3D FEM Interconnect Capacitance Simulations of ULSI DRAM Cells, A. Heike, pp 420, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Hybrid P-Element and Trefftz Method for Capacitance Computation, M. Gyimesi, J-S. Wang, and D.F. Ostergaard, pp 424, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh Morphing, V.I. Zhulin, S.J. Owen and D.F. Ostergaard, pp 501, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Design, Fabrication and Experimental-Numerical Study of PZT Sensors, M. Arik, S.M. Zurnx, K.S. Yigit, and A. Bar-Cohen, pp 574, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

A Comparison of the Behavioral Characteristics of Miniature Gas Flow Sensors, P. Cousseau, O. Dubochet, Ph. Lerch, and Ph. Renaud, pp 594, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Analysis of Anodic Bonding and Packaging Effects in Microsensors T. Shing, pp 613, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications, A. Gupta, R. Bashir, G.W. Neudeck and M. McElfresh, pp 617, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Design and Simulation of a Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer, G. Li, Z. Li, C. Wang, Y. Hao, T. Li, and G. Wu, pp 628, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Simulation and Experimental Verification of Micro Polymerase Chain Reaction Chips, Y. Lin, C. Yang, M. Yuan, and Y. Change, pp 648, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Micromirror Array Design and Simulation, M. Huja and M. Husak, pp 672, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Numerical Simulations to Predict the Functionality of Optical Devices, K. P. Scherer, H. Eggert, H. Guth, I. Sieber and P. Stiller, pp 680, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS), D.F. Ostergaard and M. Gyimesi, pp684, Proc, of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

Quality Based Design and Design for Reliability of Micro Electro Mechanical Systems (MEMS) Using Probabilistic Methods, S. Reh, P. Lethbridge and D.F. Ostergaard, pp 708, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

The Simulation of Natural Convection Around a Deformed Structure Induced by Heat Generating of Passing Electric Current, Qin Yin Fan, Proc. ANSYS Conference 2000, 2000.

Validation of high displacement piezoelectric actuator finite element models, B. K. Taleghani, pp 37, Proc. SPIE Vol. 4073, p. 37-45, Fifth European Conference on Smart Structures and Materials, August 2000.

Three-dimensional finite element analysis of composite patches with structurally integrated fiber optic sensing, G. J. Tsamasphyros, N. K. Furnarakis, G. N. Kanderakis, Z. P. Marioli-Riga, pp 830, Proc. SPIE Vol. 3985, Smart Structures and Materials, June 2000.

Piezoelectrically actuated miniature peristaltic pump, Y. Bar-Cohen, Z. Chang, pp 669, Proc. SPIE Vol. 3992, Smart Structures and Materials, June 2000.

Efficient reduced order modeling for system simulation of micro-electro-mechanical systems (MEMS) from FEM models, B. Affour, P. Nachtergaele, S. Spirkovitch, D. Ostergaard, M. Gyimesi, pp 50 Proc. SPIE Vol. 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, April 2000.

Structural and Thermal Analysis of a MEMS Angular Gyrocope, C. Painter and A. M. Shkel, SPIE, 2000 (?)

Numerical Simulation of Pulse-Width-Modulated Micropumps with Diffuser/Nozzle Elements, Nam-Trung Nguyen, Xiaoyang Huang, pp T43.02, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

A method for thermal model generation of MEMS packages, M.Rencz, V.Székely, Zs.Kohári, B.Courtois, p209, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2000), 2000.

A Modular Approach for Simulation-Based Optimization of MEMS, P. Schneider, E. Huck, S. Reitz, S. Parodat1, A. Schneider, P. Schwarz, p71-82, Volume 4228, SPIE Proceedings Series -Design, Modeling, and Simulation in Microelectronics, November 2000.

2001:

Simulation and Characterization of High Q Microresonators Fabricated by UV-LIGA, S. Basrour, H. Majjad, J. R. Coudevylle, M. de Labachelerie, pp 294 , Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2001), 2001

Development of Patterned SMA Strips as Self Heating Resistors, J. Chen, B. C. Cai, D. Xu, L. Wang, and X. L. Cheng, pp 322 , Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2001), 2001

Effects of Slider-Driven Piezo-Microactuator Placements and Profiles on HGA Sway Mode, J. Yang and S. Chen, pp 326 , Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2001), 2001

Modeling and Simulation of THUNDER Actuators using ANSYS Finite Element Analysis, C. Kennedy, T. Usher, J. Mulling, and A. Kingon, pp 330, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2001), 2001.

Modeling and dynamic Simulation for Electrostatically Driven Micromirror, S. Kweon, H. Lee and H. Shin, pp 334 , Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2001), 2001

Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard disk Drive, M. Jianqiang, C. Shixin and L. Yi, pp350 , Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2001), 2001

Study of a Novel Isotropic Suspension design for an Angular Gyroscope, C. Painter and A. Shkel, pp 354 , Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2001), 2001

Investigation Into the Standardization of Micromechanical Components and their Simulation and Computation Using FEM - Case Study of Diaphragms-, E. Weiss, E. Welp, U. Witzel, A. Wieck and e. Schmidt, pp 366 , Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2001), 2001

Bonding Pad Resistance. A Combined Approach, G. Bouche, R. Gonella and E. Sabouret, 366 , pp 442, Proc. of the Modeling and Simulation of Microsystems Conference (MSM 2001), 2001

Q-Optimized Lateral Free Beam Micromechanical Resonators - Hsu, Clark and Nuygen, (Transducers 2001)

A Modal Decomposition Technique for Fast Harmonic and Transient Simulations of MEMS; Bennini, F.; Mehner, J.; Dötzel, W., pp. 477, International MEMS Workshop 2001 (IMEMS 2001), Singapore 2001.

Development of ANSYS Multiphysics Modules for MEMS, J. Wibbeler, J. Mehner, F. Vogel, F. Bennini, F.; CAD- FEM GmbH. International Congress on FEM Technology 2001, ref: 2.4.6, Potsdam 2001.

Computational Methods for Reduced Order Modeling of Coupled Domain Simulations - Benini, Mehner and Dozel (2001)

Development of ISFET array-based microsystems for bioelectrochemical measurements of cell populations, Sergio Martinoia, Nicola Rosso, & Massimo Grattarola, pp1043, volume 16, Biosensors & Bioelectronics, 2001.

A HARPSS Polysilicon Vibrating Ring Gyroscope, F. Ayazi and K. Najafi, pp169, IEEE/ASME Journal of Microelectromechanical Systems, June 2001.

Die-Level Characterization of Bulk-Etched MEMS Using Resonant Ultrasound Spectroscopy, H. Guo, A.Lal, p. 1406-1409, Digest of Technical publications of the 11th International Conference on Solid State Actuators (Transducers '01), 2001.

Theoretical Study of Surface MEMS RF Switch Structure, J. Ming, G. Fangmin, Z. Ziqiang, L. Zongsheng, C. Jianpeng, Y. Wang, X. Ge, Y. Yang, p. 242-245, Vol. 4414, Proceeding of SPIE -International Conference on Sensor Technology (ISTC 2001).

2002:

Numerical Analysis of a Microfluidic Oscillator Flowmeter Operating with Gases or Liquids, E.W. Simões, R. Furlan and M.T. Pereira, pp36, Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

Simulation and Modeling of a Micro Pressure Sensor Array, J. Jin and Z. Zhou, pp306, Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators, R. Sattler, G. Schrag and G. Wachutka, pp124, Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive, M. Jianqiang, C. Shixin, L. Yi, L. Boon Buan, pp222, Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

Comparative Studies of Novel Capacitive Transducers with Non-Planar Diaphragms, J. Chen, L. Liu and Z. Li, pp238, Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators, J. Cheng, J. Zhe, X. Wu, K.R. Farmer, V. Modi and L. Frechette, pp298 , Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

Simulation and Validation of Bulk Micromachined 6H-SiC High-g Piezoresistive Accelerometer, A.R. Atwell, R.S. Okojie, K.T. Kornegay, S. Roberson and A. Beliveau, pp270, Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program, M. Gyimesi, D. Ostergaard and I. Avdeev, pp380, Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

The Numerical Simulation of a Substractive Process for the Fabrication of 3-D Low Temperature Co-Fired Ceramics Packaging Structures and Devices: Jet Vapor Etching, I. Ramos, L. García, E.W. Simoes, R. Furlan, J.J. Santiago-Aviles and M.T. Pereira, pp446, Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

Compact Thermal Model for Transient Temperature Fields in Electronic Systems, Y.C. Gerstenmaier and G. Wachutka, pp608, Proc. of the Modeling and Simulation of Microsystems Conference (MSM2002), 2002.

Investigating the Reliability of Electrostatic Comb-Drive Actuators Utilized in Microfluidic and Space systems Using Finite Element Analysis - Moussa, Ahmed, Badawy, and Moussa (IEEE 2002)

Modeling a MEMS Switch -Yan, McGruer, Adams and Majumder, 2002.

A new type of high bandwidth RF MEMS switch - Toggle Switch, B. Schauwecker, K. M. Strohm, W. Simon, J. Mehner, J.-F. Luy, pp 237, Journal of Semi-conductor Technology and Science, Special Issue on MEMS, Vol. 2, No. 4, December 2002.

MOSCITO - a program system for MEMS optimization, P. Schneider, A. Schneider, J. Bastian, S. Reitz, P. Schwarz, Proc. DTIP Conference, Cannes, May 5-8, 2002.

A Novel Linearly Tunable MEMS Variable Capacitor, S Seok et al, p82-86, volume 12, 2002 J. Micromech. Microeng.

Design of Torsion Flexures for MEMS Bearings, J. Casstevens and J. Furmanski, 2002.

2003:

Using a Heat Transfer Analogy to Solve for Squeeze Film Damping and Stiffness Coefficients in MEMS Structures- D. Ostergaard and J. Mehner (ANSYS January 23, 2003)

Reduced Order Modelling of Fluid Structural Interactions in MEMS Based on Modal Projection Technique - J. Mehner, W. Doetzel, B. Schauwecker and D. Ostergaard, pp 1840, Transducers 2003.

Design & Development of a New Thermally Stable High Vacuum IR Bolometer Package, C.S. Premachandran, N. Khan, X. Zhang, C. S. Choong and T.C. Chai, pp 392, Proceedings of the 51st ECTC, 2003

A Mechanical Approach to Overcome RF MEMS Switch Stiction Problem, L.L. Mercado, S.M. Kuo, T.Y.T. Lee, and L. Liu, pp 377, Proceedings of the 51st ECTC, 2003

FEM Assisted Design of Novel Electrothermal Actuators, S. Deladi, G. Krijnen and M. Elwenspoek, pp 400, Volume 1 Chapter 11: MEMS Design and Application, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show.

Extensions of Spring Model Approach for Continuum-based Topology Optimization of Compliant Mechanisms, M. Sharma and T. Udeshi, pp 440, Chapter 11: MEMS Design and Application, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show.

Modeling and Simulation of A Surface Micromachined Triaxial Accelerometer, L. Jiang, W.N. Carr, pp 344, Volume 1, Chapter 11: MEMS Design and Application, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show.

Simulation and Optimization of Tesla Valves, T-Q Truong and N-T Nguyen, pp 178, Chapter 9: Micro Fluidics, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show.

Efficient Modelling and Simulation of 3D Electro-Thermal Model for a Pyrotechnical Microthruster, T. Bechtold, E. B. Rudnyi, J. G. Korvink and C. Rossi, International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications PowerMEMS 2003, Makuhari, Japan, 4-5 December 2003.

Electromechanical Modeling and Simulation of RF MEMS Switch, Y. Zhu and H.D. Espinosa, pp 8, Proceedings of the 4th International Symposium on MEMS and Nanotechnology, the 2003 SEM Annual Conference and Exposition on Experimental and Applied Mechanics.

Nanoscale Displacement and Strain Measurement, Y. Zhu, F. Barthelat, P.E. Labossiere, N. Moldovan, and H.D. Espinosa, Session 77, Paper 155, Proceedings of the 2003 SEM Annual Conference and Exposition on Experimental and Applied Mechanics.

Analysis of Flexible Joints for Micromachined Devices, R. W. Johnstone and M. Parameswaran, Proceedings of IMECE'03. Washington, D.C., November 2003.

Advanced MEMS-based infrared imager, Ming Chen, p. 901-903, Volume 5116, Proceedings of SPIE - Smart Sensors, Actuators, and MEMS, April 2003.

Anodic Bonding of Optical Fibers to Silicon for Integrating MEMS Based Optical Pressure and Temperature Ssensors Onoto Optical Fibers, A. Saran, D. C. Abeysinghe, P. Deshmukh, R. Flenniken 1, J. T. Boyd, p564. TRANSDUCERS ‘03, The 12th International Conference on Solid State Sensors, Actuators and Microsystems, 2003.

Arrays of Micro-Electrodes and Electromagnets for Processing of Electro-Magneto-Elastic Multifunctional Composite Materials, J. G. Boyd IV, D. C. Lagoudas, and C.-S. Seo, p. 268-277, Volume 5055, Proceedings of SPIE - Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, July 2003.

2D Simulation of Multilayered MEMS Structures, P. R. Apte, A. S. Chandorkar, P. S. Gandhi, p. 761-772, Volume 5062, Proceedings of the SPIE - Smart Materials, Structures, and Systems, 2003.

A Simple Deflection-Testing Method to Determine Poisson's Ratio for MEMS Applications, C Luo et al, p129-133, volume 13, J. Micromech. Microeng., 2003.

Humidity-Induced Voltage Shift on MEMS Pressure Sensors, J. A. Chiou, S. Chen, and J. Jiao, p 470-474, Volume 125, Issue 4, Journal of Electronic Packaging, December 2003.

Design of Radio Frequency (RF) MEMS Switches– Modeling, Y. Zhu and H. D. Espinosa, Proceedings of IMECE’03: 2003 ASME International Mechanical Engineering Congress & Exposition, Washington, D.C., 2003.

2004:

Voltage-tunable piezoelectrically-transduced single-crystal silicon
micromechanical resonators, Gianluca Piazza, Reza Abdolvand, Gavin K. Ho, Farrokh Ayazi, pp71, Sensors and Actuators A 111 (2004).

Reliability of Capacitive RF MEMS Switches at High and Low Temperatures, Yong Zhu, Horacio D. Espinosa, pp. 317-328, vol. 14, International Journal of RF and Microwave Computer-Aided Engineering.

Effect of Temperature on Capacitive RF MEMS Switch Reliability – A Coupled-Field Analysis,Y. Zhu and H. D. Espinosa, pp1270, volume 14, Journal of Micromechanics and Microengineering, 2004.

Computational Prototyping of an RF MEMS Switch using Chatoyant, M. Bails, J.A. Martinez, S.P. Levitan, I. Avdeev, M. Lovell and D.M. Chiarulli, pp 355, Volume 2, Chapter 6: MEMS Modeling, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show.

Characterization of an Electro-thermal Microactuator with Multi-lateral Motion in Plane, C.H. Pan, Y.K. Chen and C.L. Chang, pp 299, Volume 2, Chapter 6: MEMS Modeling, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show.

mor4ansys: Generating Compact Models Directly From ANSYS Models, E.B. Rudnyi, J. Lienemann, A. Greiner and J.G. Korvink, pp 279, Volume 2, Chapter 6: MEMS Modeling, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show.

Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator, J. Juillard, M. Cristescu and S. Guessab, pp 275, Volume 2, Chapter 6: MEMS Modeling, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show.

Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators, A. Atre and S. Boedo, pp 263, Volume 2, Chapter 6: MEMS Modeling, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show.

Free Surface Flow and Acousto-Elastic Interaction in Piezo Inkjet, H. Wijshoff, pp 215, Volume 2, Chapter 6: MEMS Modeling, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show.

Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching, B.G. Morris and G.S May, p418, Volume 1, Chapter 9: Smart MEMS and Sensor Systems, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show.

Micromachined III-V Multimorph Actuator Model and Design using Simulated Annealing (SA)-Based Global Optimization, A. Ongkodjojo, F.E.H. Tay and R. Akkipeddi, p374, Volume 1, Chapter 8: MEMS Design and Application, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show.

Development of an Advanced Simulation System for the Analysis of Particle Dynamics in LASER based Protein Ion Sources, A. Hieke, pp180, Volume 1, Chapter 5: Bio Nano Computational Methods and Applications, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show

Model Order Reduction for Large Scale Engineering Models Developed in ANSYS, E. B. Rudnyi and J. G. Korvink. PARA'04, Workshop On State-of-the-art In Scientific Computing, Technical University of Denmark, June 20-23, 2004

Model Order Reduction of MEMS for Efficient Computer Aided Design and System Simulation, E. B. Rudnyi and J. G. Korvink. MTNS2004, Sixteenth International Symposium on Mathematical Theory of Networks and Systems.

Model Order Reduction of 3D Electro-Thermal Model for a Novel Micromachined Hotplate Gas Sensor, T. Bechtold, J. Hildenbrand, J. Woellenstein and J. G. Korvink, pp 263, Proceedings of 5th International conference on thermal and mechanical simulation and experiments in microelectronics and microsystems, EUROSIME2004.

Compact Electro-thermal Models of Semiconductor Devices with Multiple Heat Sources, C. Bohm, T. Hauck, E. B. Rudnyi, J. G. Korvink, pp101, Proceedings of 5th International conference on thermal and mechanical simulation and experiments in microelectronics and microsystems, EUROSIME2004.

Model Order Reduction for Linear Convective Thermal Flow, C. Moosmann, E. B. Rudnyi, A. Greiner, J. G. Korvink, pp317, THERMINIC 2004, 10th International Workshop on THERMAL INVESTIGATIONS of ICs and Systems.

MEMS Compact Modeling Meets Model Order Reduction: Examples of the Application of Arnoldi Methods to Microsystem Devices, J. Lienemann, D. Billger, E. B. Rudnyi, A. Greiner, and J. G. Korvink, pp303, Volume 2, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show.

Automatic Order Reduction for Finite Element Models, J. Lienemann, A. Greiner, E. B. Rudnyi, J. G. Korvink, L. Ferrario, M. Zen, pp94, Abstracts of the 9th National conference on Sensor and Microsystems, AISEM 2004.

Efficient Optimization of Transient Dynamic Problems for a Micro Accelerometer Using Model Order Reduction, J. S. Han, E. B. Rudnyi, J. G. Korvink, pp356, Proceedings of 21st International Congress of Theoretical and Applied Mechanics, ICTAM04.

Iterative Magnetic/Structural Simulation of a MEMS Micro-shutter, Abed M. Khaskiaa, David J. Powera, James P. Loughlinb, ANSYS International Conference, 2004.

SMA Actuated RF MEMS Switch, George K. El-Khoury & Mohammad A. Hotait, 2004

Comparison of three finite element models for analysis of MEMS micromirrors, R. Jafari Shapoorabadi, Andrew G. Kirk, pp849, Volume 5577, SPIE Photonics North 2004.

Metallic MEMS structures for assembly of optoelectronic components, Arunkumar C Nallani, Ting Chen, JB. Lee, Donald J Hayes and David B Wallace, MAPS Advanced Technology Workshop on Optoelectronics Device Packaging, Bethlehem, PA, October 11-14, 2004.

Modeling surface-micromachined electrothermal actuators, R.W. Johnstone and M. Parameswaran, pp 193, volume 29, #3, Canadian Journal of Electrical and Computer Engineering, 2004.

Design of Microfabricated Strain Gauge Array to Monitor Bone Deformation In Vitro and In Vivo, Gloria Y. Yang, Vasudev J. Bailey, Gisela Lin, William C. Tang, & Joyce H. Keyak, IEEE Fourth Symposium on Bioinformatics and Bioengineering (BIBE 2004).

Modeling and Simulation of Integrated Piezo-resistive Pressure Sensors, Diener, Reitz, Brokmann, Schneider, Ubensee & Bartuch, CadFEM user conference, 2004

Modeling an Electrostatically Actuated MEMS Diaphragm Pump, J. Nabity, ASEN 5519-006, 2004.

Metallic microgripper with SU-8 adaptor as end-effectors for heterogeneous micro/nano assembly applications, K. Kim, E. Nilsen, T. Huang, A. Kim, M. Ellis, G. Skidmore, J.B. Lee, pp689, vulume 10, number 10, Microsystem Technologies, December 2004.

Failure analysis of MEMS RF cantilevered beam switch, F. Guo, X. Xu, C. Li, Y. Ge, J. Yu, P. Xin, R. Zhu, Z. Lai, Zi. Zhu, and W. Lu, p 506-509, Proceedings of SPIE -- Volume 5774, Fifth International Conference on Thin Film Physics and Applications, December 2004.

Analysis on the Optical MEMS Pressure Sensors Based on Circular Multilayer Diaphragm, M. Li, M. Wang, T. Wang, H. Rong, and X. Chen, p. 238-245, Volume 5641, Proceedings of SPIE - MEMS/MOEMS Technologies and Applications II, December 2004.

Comparison of three finite element models for analysis of MEMS micromirrors, R. J. Shapoorabadi, A. G. Kirk, p. 849-860, Volume 5577, Laser Radar Techniques for Atmospheric Sensing. Proceedings of the SPIE, (2004).

Fringe Capacitance Models for MEMS Devices, R. Houliham and M. Kraft, p 70-75, Proceedings of 15th MicroMechanics Europe Workshop, 2005.

Sliding-blade MEMS iris and variable optical attenuator, R. R. A. Syms et al, p1700-1710, volume 14, J. Micromech. Microeng., 2004.

2005:

Packaging Design with Thermal Analysis of LED on Silicon Substrate, C. Tsou, Y.S. Huang, H.C. Li and T.S. Lai, pp 513, chapter 8, volume 3, Nanotech 2005.

Ion Sources for Biomolecules with Controlled Superposition of Electric and Pneumatic Fields,
A. Hieke, pp 648, chapter 10, volume 3, Nanotech 2005.

Stress Optimization of a Micromechanical Torsional Spring, T. Klose, D. Kunze, T. Sandner, H. Schenk, H. Lakner, A. Schneider and P. Schneider., p602, chapter 9, volume 3, Nanotech 2005.

Design Optimization of a Surface Micromachined Electro-Thermal Beam Flexure Polysilicon Actuator, A. Atre, pp493, chapter 8, volume 3, Nanotech 2005.

Design, Modelling and Simulation of a PZN-PT Actuated Micropump, D. Malleo, C. Haas and M. Kraft, p700, chapter 11, volume 1, Nanotech 2005.

Connecting heat transfer macromodels for MEMS-array structures, T. Bechtold, E. B. Rudnyi, J. G. Korvink, M. Graf, A. Hierlemann, pp 1205, volume 15, number 6, Journal of Micromechanics and Microengineering 2005.

Efficient optimization of transient dynamic problems in MEMS devices using model order reduction, J. S. Han, E. B. Rudnyi, J. G. Korvink, p822, volume 15, number 4, Journal of Micromechanics and Microengineering 2005.

Sub-micron metallic electrothermal actuators, J. Lee, D. S. Park, A. Nallani, G. Lee, and J.B. Lee, p322, volume 15, number 2, Journal of Micromechanics and Microengineering, February 2005.

Parametric Model Extraction for MEMS Based on Variational Finite Element.Techniques, J.E. Mehner, A. Shaporin, V. Kolchuzhin, W. Dötzel and T. Gessner 13, Vol. 1, p776-779, Intern. Conf. on Solid State Sensors, Actuators and Microsystems “Transducers‘05”, 2005,

Silicon Nitride-On-Silicon Bar Resonator Using Internal Electrostatic Transduction, Sunil A. Bhave and Roger T. Howe, TRANSDUCERS’05
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 5-9, 2005

Human blood rheology in MEMS-based microneedles, P. Aggarwal and C. R. Johnston, p185-195, Volume 5651, Proceedings of SPIE -Biomedical Applications of Micro- and Nanoengineering II, February 2005.

MEMS/NEMS mechanical characterization on different thin film materials by scanning along micro-machined cantilevers, J. H. He, J. K. Luo, H. R. Le, and D. F. Moore, p. 208-219, olume 5836, Proceedings of SPIE- Smart Sensors, Actuators, and MEMS II, July 2005,

Dynamic Identification of MEMS by Eigensensitivity and Newmark Simulation, p 155 - 162, Volume 44, Number 2, August 2005, Analog Integrated Circuits and Signal Processing.

FEM Modeling of MEMS Based Sensor for Sensing Antigen/Antibody, B. G. Sheeparamatti, M. S. Hebbal, and J. S. Kadadevaramath ,Proceedings of ISSS 2005 International Conference on Smart Materials Structures and Systems July 28-30, 2005.

Modelling Squeeze Film Effects in a MEMS Accelerometer with a Levitated Proof Mass, R. Houlihan et al, p893-902, volume 15, J. Micromech. Microeng., 2005.

Dynamics and Squeeze Film Gas Damping of a Capacitive RF MEMS Switch, P G Steeneken et al, p176-184, volume 15, J. Micromech. Microeng. , 2005.

An Ultra-Sensitive Optical MEMS Sensor for Partial Discharge Detection, X. Wang et al, p521-527, volume 15, J. Micromech. Microeng., 2005.

2006:

Parametric Simulation of MEMS Based on Automatic Differentiation of Finite Element Codes, V. Kolchuzhin, J. Mehner, T. Gessner and W. Dötzel, Vol.3 (2006) p507-510, Nanotech 2006 - NSTI Nanotechnology Conference and Trade Show Technical Proceedings.

Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements, J. You, M. Packirisamy and I. Stiharu, p590-593, volume 3, Nanotech 2006 - Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, 2006.

Application of a Design Methodology Using a 2D Micro Scanner, O. Anac, I. Basdogan, 2006 NSTI Nanotechnology Conference and Trade Show, May 2006, Boston, MA.

Model Order Reduction for the Extraction of Small Signal Equivalent Circuit Models of RF-MEMS, L. Del Tin, R. Gaddi, E. B. Rudnyi, A. Greiner, J. G. Korvink, p119, SCEE, 2006.

If you have published a technical paper about a MEMS application using ANSYS products for the analysis and would like it listed here then please contact Paul Lethbridge